The plungers of the pumps are moved via cams by stepper motors which swing or rotate back and forth within a certain angular range. |
As the semiconductor industry looks to the future, stepper manufacturers are gearing up for extreme ultraviolet lithography. |
Computer-driven stepper motors rotate the mirrors to obtain the desired angle of incidence. |
The drums were mounted on a platform that could be raised and lowered by an additional stepper motor. |
A computer-controlled stepper motor allowed the user to select from 31 filters. |
Unlike earlier reductions, this particular transition requires a major design shift in stepper optics from refractive to reflective. |