| Unlike earlier reductions, this particular transition requires a major design shift in stepper optics from refractive to reflective. |
| The actual amount of the foil delivered would be controlled by the stepper motor. |
| The relationships linking the stepper motor position and wavelength have been obtained by averaging the results of more than 20 spectra. |
| As the semiconductor industry looks to the future, stepper manufacturers are gearing up for extreme ultraviolet lithography. |
| Spectra were acquired before the stepper motor began moving, throughout the 6-blanch cycle, and after the blanch cycle was completed. |
| Each probe can be moved in two directions, axis and angle, by stepper motors through a remote-control system. |
