| Spectra were acquired before the stepper motor began moving, throughout the 6-blanch cycle, and after the blanch cycle was completed. |
| The actual amount of the foil delivered would be controlled by the stepper motor. |
| The relationships linking the stepper motor position and wavelength have been obtained by averaging the results of more than 20 spectra. |
| The plungers of the pumps are moved via cams by stepper motors which swing or rotate back and forth within a certain angular range. |
| Computer-driven stepper motors rotate the mirrors to obtain the desired angle of incidence. |
| As the semiconductor industry looks to the future, stepper manufacturers are gearing up for extreme ultraviolet lithography. |
